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For a 𝑝-type substrate doped to NA = 4.5x1015 cm-3 and diffusion of arsenic from a constantsurface density of 1.5x1021 cm-3, calculate (use k = 8.62x10-5 eV/K):(a) the junction depth 𝑥𝑗 (in m) for diffusion at T = 1100 °C for t = 90 min. [10 Pts](b) the time (in min) required for a junction depth of 𝑥𝑗= 1 m at 1100 °C. [10 Pts]Use the diffusion equation below:𝑁(𝑥, 𝑡) = 𝑁0𝑒𝑟𝑓𝑐 ( 𝑥2√𝐷𝑡)where𝑁0 is the surface density (#/cm3).𝐷 is the diffusion coefficient and given by 𝐷 = 24exp(-Ea/kT) cm2/s for arsenicin silicon. Ea = 4.08 eV.𝑡 is the length of time the diffusion takes place (s)The complementary error function erfc(y) can be found in many math apps includingExcel

Question

For a 𝑝-type substrate doped to NA = 4.5x1015 cm-3 and diffusion of arsenic from a constantsurface density of 1.5x1021 cm-3, calculate (use k = 8.62x10-5 eV/K):(a) the junction depth 𝑥𝑗 (in m) for diffusion at T = 1100 °C for t = 90 min. 10 Pts the time (in min) required for a junction depth of 𝑥𝑗= 1 m at 1100 °C. [10 Pts]Use the diffusion equation below:𝑁(𝑥, 𝑡) = 𝑁0𝑒𝑟𝑓𝑐 ( 𝑥2√𝐷𝑡)where𝑁0 is the surface density (#/cm3).𝐷 is the diffusion coefficient and given by 𝐷 = 24exp(-Ea/kT) cm2/s for arsenicin silicon. Ea = 4.08 eV.𝑡 is the length of time the diffusion takes place (s)The complementary error function erfc(y) can be found in many math apps includingExcel

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Solution

To solve this problem, we need to use the given diffusion equation and the values provided.

(a) First, we need to calculate the diffusion coefficient (D) using the given formula D = 24exp(-Ea/kT).

Here, Ea = 4.08 eV, k = 8.62x10^-5 eV/K, and T = 1100 °C = 1373 K (converting Celsius to Kelvin by adding 273).

Substituting these values into the formula, we get D = 24exp(-4.08/(8.62x10^-5 * 1373)) cm^2/s.

Next, we need to find the junction depth (xj) using the given time t = 90 min = 5400 s (converting minutes to seconds by multiplying by 60).

The junction depth can be found by rearranging the diffusion equation to solve for x: x = sqrt(Dt) * erfc^-1(N/N0).

Here, N = 4.5x10^15 cm^-3, N0 = 1.5x10^21 cm^-3, and erfc^-1 is the inverse complementary error function, which can be found using a math app or calculator.

Substituting the values into the formula, we get xj = sqrt(D * 5400) * erfc^-1(4.5x10^15 / 1.5x10^21) µm.

(b) To find the time required for a junction depth of xj = 1 µm at 1100 °C, we can rearrange the diffusion equation to solve for t: t = (x/ sqrt(D))^2 * erfc(N/N0).

Substituting the values into the formula, we get t = (1/ sqrt(D))^2 * erfc(4.5x10^15 / 1.5x10^21) min.

Remember to convert the time from seconds to minutes by dividing by 60.

This problem has been solved

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